Agreement on EUV reflectometry between PTB and ZEISS extended until the end of 2029

Cooperation strengthens the European technology network

PTB's laboratory for metrology with synchrotron radiation in Berlin-Adlershof is an important node in the network of European research infrastructure that has helped to enable the monopoly position of European industry in EUV lithography as a key technology for modern semiconductor production.

For PTB, the close co-operation with ZEISS since 1998 forms an important basis for the continuous development of its metrological capabilities in the EUV spectral range, which in turn strengthens the European technology network. Based on the use of synchrotron radiation for radiometry, reflectometry and scatterometry as well as combinations of these and other analytical procedures to form hybrid methods, PTB develops new metrological solutions, e.g. for semiconductor technology, and makes its measurement services available to its numerous co-operation partners from research institutes or industry.

With the signing of the 10th addendum to the original agreement, the cooperation with ZEISS has now been extended until the end of 2029. The commissioning of a new beamline in the PTB laboratory at the MLS to increase measurement capacities falls within the period of the contract extension. The instrumentation in the laboratory at BESSY II is also to be modernised in the shorter wavelength range. This will benefit the development of new measurement methods (based on well-established measurement techniques) for the investigation of structured surfaces. The shorter wavelength in the EUV spectral range compared to visible light opens up new possibilities for measuring nanostructures on semiconductor materials.

This metrological method development is of great interest to European manufacturers of equipment for the semiconductor industry, as established measurement methods in the classic optical spectral range are reaching the limits of their detection capabilities. The transfer of technological expertise in the field of EUV from lithography to metrology is therefore a great opportunity for these companies.

Metrology with Synchrotron Radiation - PTB.de

Contact:

Michael Kolbe
Physikalisch-Technische Bundesanstalt
Department 7.1: Radiometry with Synchrotron Radiation
Working Group: EUV Radiometry
michael.kolbe(at)ptb.de
www.ptb.de

Press release PTB, 17 March 2025